Practical work : Simulate mode-matching between drive and sense modes using a lumped-parameter model. Kaajakari provides a Matlab script – run it to find optimal frequency split (< 1% error).
where ( n ) = number of fingers, ( t ) = thickness, ( g ) = gap, ( V ) = voltage. occurs when displacement exceeds ( g/3 ). This is a critical design limit. practical mems ville kaajakari pdf work